10:45 - 11:00
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Manuscript ID. 1064
Paper No. 2023-SAT-S0403-O001
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Vera Marinova
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Anisotropy of two-dimensional layered materials towards applications in ultrathin flat optical elements
Vera Marinova, IOMT-BAS (Bulgaria), NYCU (Taiwan); Vladimira Videva, Blagovest Napoleonov, Irnik Dionisiev, IOMT-BAS (Bulgaria); Stefan Petrov, NYCU (Taiwan), ISSP-BAS (Bulgaria); Minh Nguyen Hong Chau, NYCU (Taiwan); Dimitre Dimitrov, ISSP-BAS (Bulgaria), IOMT-BAS (Bulgaria); Ken Yuh Hsu, NYCU (Bulgaria); Shiuan Huei Lin, NYCU (Taiwan)
Two-dimensional (2D) layered materials demonstrate extremely high optical anisotropy that gains an enormous interest for integration in polarization nanodevice applications. Here, we present variety of synthesized 2D nanolayers/ flakes with their atomically thin structures confirmed by Raman, AFM and TEM analysis. Furthermore, high birefringence has been measured. We also demonstrate a polarization-plane rotation when linearly polarized light propagates through 2D nanoflakes that open a new road to integrate into atomically thin optical elements.
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11:00 - 11:15
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Manuscript ID. 0472
Paper No. 2023-SAT-S0403-O002
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Stefan Petrov
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Aluminum doped Zinc Oxide thin films for multipurpose application as electrode and alignment layers in liquid crystal phase retarders
Stefan Petrov, National Yang Ming Chiao Tung University (Taiwan), Bulgarian Academy of Science (Bulgaria); Vera Marinova, Bulgarian Academy of Science (Bulgaria), National Yang Ming Chiao Tung University (Taiwan); Chau Nguyen Hong Minh, Shuan Huei Ling, Ken Hsu, National Yang Ming Chiao Tung University (Taiwan)
Here, we demonstrate the feasibility of transparent and conductive Aluminum-doped Zinc Oxide (AZO) thin films to operate simultaneously as electrode and alignment layer in Liquid Crystal (LC) device assembly. Controlling deposition process AZO layers with very high transparency and excellent conductivity were obtained. The exceptionally low surface free energy of (100) oriented AZO, along with the topological modification following mechanical rubbing treatment were used to elucidate the ordering mechanism of LC molecules on the surface of AZO film. The quality of the alignment and competitive electro-optical performance of the assembled LC device reveals the great potential of AZO thin films.
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11:15 - 11:30
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Manuscript ID. 0107
Paper No. 2023-SAT-S0403-O003
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Pei-Ling Chen
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The Grating Period Measurement with Reflection Type Heterodyne Grating Interferometer
Pei-Ling Chen, Guan-Lin Huang, Shih-Han Hung, Cheng-Chih Hsu, National United University (Taiwan)
In this study, unknown grating period measurement of a reflection type grating can be determined by a heterodyne grating interferometer. The experiment results showed that the difference between proposed method and commercial product specification can be better than 10 nm.
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11:30 - 11:45
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Manuscript ID. 0791
Paper No. 2023-SAT-S0403-O004
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Wun-Yan Chen
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Development of Surface Topography Measurement Based on Polarization Interferometry
Wun-Yan Chen, Yue-Jhe Tsai, Ju-Yi Lee, National Central University (Taiwan)
This research is based on Fizeau-type polarization interferometry and employs a polarization camera, which enables full-field measurement of the wafer surface topography. Polarization interference patterns are acquired from a Fizeau interferometer using the camera, which outputs four phase-quadrature interference patterns. The surface topography of the wafer can be determined by applying a phase-shifting algorithm to the four phase-quadrature interference patterns. The method only requires the acquisition of a single interference image to calculate the surface topography of the test object, making it suitable for measuring the surface topography of continuously curved surfaces and polished materials with various reflective properties.
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11:45 - 12:00
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Manuscript ID. 0672
Paper No. 2023-SAT-S0403-O005
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Yan-Rui Lin
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Inspection for Micron-scale Circular Holes Based on the Shape-From-Focus Method
Yan-Rui Lin, Zheng-Hong Tsai, Ju-Yi Lee, National Central University (Taiwan)
Developing a three-dimensional shape measurement system based on shape-from-focus for measuring micron-scale processing holes in transparent materials. The system achieves a horizontal resolution of approximately 1.16 μm and a depth resolution of around 2 μm.
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