Session Index

S8. Thin Film and Photovoltaic Technology

Poster Session III
Sunday, Dec. 3, 2023  09:00-11:00
Presider:
Room: Building of Electrical Engineering (電機系館) (B1)
Notes:

Manuscript ID.  0026
Paper No.  2023-SUN-P0803-P001
Yu-Lin Zhu Hetero-nanostructures of Copper Sheet Grown Cuprous Oxides and Zinc Oxides Deposited by Atmospheric Pressure Plasma System for Photo-electro-chemical Hydrogen Generation Application
Yu-Lin Zhu, Kun-Ying Zhang, Hao-Yu Lee, Wen-Jen Liu, I-Shou University (Taiwan)

Cu2O nanowires (NWs) grown by the hybrid process of atmospheric pressure plasma oxidation at 300°C for 10 min and thermal oxidation at 300°C for 50 min, revealed the optimal photocurrent density was -2.92 mA/cm2 measured at 0 V (RHE). The formation of PN junctions hetero-structure resulted in the effective and rapid separation of electron-hole pairs occurred on the electrode surfaces and enhanced the redox reactions. The deposition of ZnO nanoparticles (NPs) on the surface of Cu2O NWs with optimal photocurrent density was -7.72 mA/cm2 measured at 0 V (RHE). The solar-to-hydrogen (STH) conversion efficiency was 1.73% for ZnO/Cu2O photocathode.

  Preview abstract
 

Manuscript ID.  0514
Paper No.  2023-SUN-P0803-P002
Zhi-Wen Lin Enhancing the Efficiency of Triple-Cation Perovskite Solar Cells by Different Cationic-based Chloride Doping Ratios
Zhi-Wen Lin, Wei-Shuo Lai, National Taipei University of Technology (Taiwan); Ching-Ho Tien, Ming Chi University of Technology (Taiwan); Lung-Chien Chen, National Taipei University of Technology (Taiwan)

We discuss the effect of the perovskite film in different doping ratios of the cesium
chloride (CsCl) and methylamine hydrochloride (MACl). Finally, the solar cell prepared with
Cs0.1MA0.09FA0.81PbCl0.14I2.86 as the active layer has the best photovoltaic characteristics, and
its PCE reaches 18.6%.


  Preview abstract
 

Manuscript ID.  0519
Paper No.  2023-SUN-P0803-P003
Jhih-Rong Chen Impact of oxygen partial pressure on resistive switching characteristics of ZWO thin films RRAM devices
Tzu-Yuan Liu, National Cheng Kung University (Taiwan); Sheng-Po Chang, National Kaohsiung University of Science and Technology (Taiwan); Chih-Cheng Cheng, Fu-Yuan Jheng, Jhih-Rong Chen, Jone-Fang Chen, Shoou-Jinn Chang, National Cheng Kung University (Taiwan)

In this study, the effect of different oxygen partial pressures on ZnWO4 based RRAM devices was investigated. The results show that films with excessive partial pressure exhibit lower HRS/LRS ratios as well as centralized formation voltage. These outcomes point to a strong correlation between the oxygen partial pressure and the filament formation mechanism.

  Preview abstract
 

Manuscript ID.  0151
Paper No.  2023-SUN-P0803-P004
An-Hsiung Cheng Hybrid Deposition of E-gun Evaporation and RF Magnetron Sputtering for Molybdenum Trioxide Doped Titanium Dioxide on Electrochromic Devices
An-Hsiung Cheng, Hsi-Chao Chen, Yu-Xuan Zhuang, Chi-Kai Feng, Xiang-Zhe Lin, Rong-Ling Ni, Hong-Jie Lin, National Yunlin University of Science and Technology (Taiwan)

This paper investigates the hybrid deposition of E-gun evaporation and RF magnetron sputtering for molybdenum trioxide (MoO3) doped titanium dioxide (TiO2) used on complementary electrochromic devices. The main electrochromic layer consists of MoO3 doped with TiO2, and the auxiliary electrochromic layer is made of nickel oxide (NiO). X-ray diffraction (XRD) analysis confirmed the formation of a beneficial orthorhombic phase α-MoO3, which contributes to the electrochromic effects. However, the transmittance variation (ΔT) of device can reach 61.3% at 550nm. The response times for coloring (tb) and bleaching (tc) are 8 seconds and 9 seconds, respectively.

  Preview abstract
 

Manuscript ID.  0192
Paper No.  2023-SUN-P0803-P005
Ji-You Yu Conductivity Study of (InxGa1-x)2O3 by Spray Pyrolysis
Ji-You Yu, Ming-Chang Shih, National University of Kaohsiung (Taiwan); Mu-Chun Wang, Minghsin University of Science and Technology (Taiwan); Wen-How Lan, National University of Kaohsiung (Taiwan)

The (InxGa1-x)2O3 films with different In/Ga ratio and HCl content in precursor were prepared by spray pyrolysis at 450oC. The film optical bandgap and temperature dependent electric conductivity were characterized. The electrical conductivity with reduced defect-related activation energy were characterized for the films with the increased In/Ga ratio in precursor. The reduced electrical conductivity was characterized for sample InGaO3 after 600oC anneal process prepared with 10% HCl in precursor. Shallow defects formed for sample after 700oC anneal process.the conductivity of the (InxGa1-x)2O3 with different activation energy for the film prepared by spray pyrolysis were characterized.

  Preview abstract
 

Manuscript ID.  0222
Paper No.  2023-SUN-P0803-P006
Hsiang-Chen Wang Cancer Cell Image Analysis and its Photoelectrochemical Response on Biosensing Chips
Kuei-Ren Chen, Department of Mechanical Engineering and Advanced Institute of Manufacturing with High tech Innovations (Taiwan); Wei-Chung Chen, Ph.D. Program in Environmental and Occupational Medicine (Taiwan); I-Chen Wu, Department of Medicine and Graduate Institute of Clinical Medicine (Taiwan); Vladimir E Fedorov, Nikolaev Institute of Inorganic Chemistry (Russian Federation), Department of Natural Sciences, (Russian Federation); Ding Fong Lin, Hsiang-Chen Wang, Department of Mechanical Engineering and Advanced Institute of Manufacturing with High tech Innovations (Taiwan)

This study controlled the number of cancer cells at 2,500, 5,000, 7,500, 10,000, and the volume of the solution to be tested was set at 20 µl. The P-type biosensor has the most significant effect on intracellular GSH response, the measured The magnitude of the transient photocurrent will decrease with the number of cancer cells and the degree of canceration. According to the experimental results, the degree of canceration and the kind of cancer cells in each tube of pleural effusion can be quickly judged, and the regression analysis coefficient of determination.

  Preview abstract
 

Manuscript ID.  0359
Paper No.  2023-SUN-P0803-P007
Yi-Ping Lin Numerical Modeling and Design Optimization of Industrial Tunnel Oxide Passivated Contact Solar Cells with Selective Passivated Contacts on the Front
Yi-Ping Lin, Jin-Cheng Chen, You-An Li, Wei-Shan Hong, National Yang Ming Chiao Tung University (Taiwan); Han-Chen Chang, Industrial Technology Research Institute (Taiwan); Ying-Yuan Huang, National Yang Ming Chiao Tung University (Taiwan), National Cheng Kung University (Taiwan)

This study investigates the benefits of front selective area TOPCon in industrial bifacial TOPCon solar cells, employing Sentaurus TCAD for optical ray tracing and Quokka2 for electrical simulations. Our simulations project a potential efficiency of approximately 25.2%, guided by optimal parameters from scholarly sources and the industrial standards reported in ITRPV 2023. Notably, a 25% efficiency is also attainable with a 150 μm wide selective TOPCon area, rendering this process more cost-effective and suitable for mass production.

  Preview abstract
 

Manuscript ID.  0496
Paper No.  2023-SUN-P0803-P008
Wei-Ting Chen Nickel Sulfide/Nickel Nanowires Array Hybrid Counter Electrodes for Dye-Sensitized Solar Cells
Wei-Ting Chen, Peng-Chi Wang, Wei-Chen Tu, National Cheng Kung University (Taiwan)

In the study, we propose hybrid counter electrodes to improve the performance of dye-sensitized solar cells. The counter electrode with a concentration of 0.130 mg/ml of nickel nanowire array on the nickel sulfide film achieved the highest conversion efficiency of 8.94%. This efficiency was 1.57% higher than that of the traditional counter electrode material platinum in dye-sensitized solar cells. There is great potential to replace platinum as the electrode material in dye-sensitized solar cells, which would reduce costs and further advance the commercialization of dye-sensitized solar cells in the future.

  Preview abstract
 

Manuscript ID.  0825
Paper No.  2023-SUN-P0803-P009
Li-Cheng Huang Growth and Characterization of GaN Thin Films on Si Substrates with AlN Buffer Layer and RF Sputtering
Li-Cheng Huang, Wei-Sheng Liu, Balaji Gururajan, Kuo-Jui Hu, Guo-Hong Shen, Yuan Ze University (Taiwan)

This study demonstrates high-quality GaN thin film deposition on Si(111) substrates via RF reactive magnetron sputtering. An AlN buffer layer alleviates lattice mismatch between silicon and GaN. Sputtering parameters optimization enhances GaN film quality. X-ray diffraction reveals dominant (002) phase (2θ ~ 34.5°) with narrow 0.96° FWHM in sputter-deposited GaN. At 10 K, photoluminescence spectra exhibit a 3.387 eV (~366 nm) emission peak.

  Preview abstract
 

Manuscript ID.  0956
Paper No.  2023-SUN-P0803-P010
Kuan-Yu Ko Environment test of Anti-Reflection Coating on Plastic Substrate by Plasma Enhanced Atomic Layer Deposition
Kuan-Yu Ko, Jia-Lun Ho, National Central University (Taiwan); Wen-Hao Cho, Chao-Te Lee, Taiwan Instrument Research Institute (Taiwan); Chen-Cheng Kuo, National Central University (Taiwan)

In this study, plasma-enhanced atomic layer deposition (PEALD) method is used to deposit anti-reflection film on PMMA substrate. The oxidation method of oxygen mixed with argon plasma is used at low temperature process 70ºC. The TiO2 anti-reflective film can be extended to 998 hours without insertion into the inhibition layer under the condition of temperature 85°C and humidity 85%RH.

  Preview abstract
 

Manuscript ID.  0149
Paper No.  2023-SUN-P0803-P011
Yu Hong Shih Research on Improving Epitaxial Growth of Gallium Oxide by Hydride Vapor Phase Epitaxy
Yu Hong Shih, Ming-Chi Chou, Hsin-Chih Chen, Chu-An Li, National Sun Yat-Sen University (Taiwan)

In this study, β-Gallium Oxide was grown on off-angled sapphire substrates by hydride vapor phase epitaxy. The crystal quality is optimized by changing the experimental conditions and annealing. And confirm through the instrument whether off-angle sapphire and
annealing are helpful for gallium oxide epitaxy. Single crystal film of β-Ga2O3 with a full-width half maximum of XRD rocking curve is 0.25 °


  Preview abstract
 

Manuscript ID.  0386
Paper No.  2023-SUN-P0803-P012
Ming Chang Shih The Fabrication of an Al/SiO2/Si MIS Device and its Photo-Current Characteristics
Ming Chang Shih, I Chieh Wu, Yen Ju Wu, Wen-How Lan, National University of Kaohsiung (Taiwan)

We demonstrate the fabrication of an Al/SiO2/Si MIS device and the characterization of its photocurrent characteristics. An electron beam evaporation was used to deposit the amorphous type SiO2 dielectric layer. It is able to achieve a maximum responsivity of 0.03 A/W at a UV wavelength of 300 nm ~ 350 nm and with strong rejection against white light. Photocurrent of the MIS device with different thicknesses of SiO2 layer was studied. A photocurrent mechanism based on the photo-excited defect states of the amorphous SiO2 and the drifting mechanism was used to explain the results.

  Preview abstract
 

Manuscript ID.  0912
Paper No.  2023-SUN-P0803-P013
Cheng-Chung Jaing The Effect of Oxygen-Plasma Treatment on the Optical and Surface Properties of Polydimethylsiloxane Layers
Chen-Chi Huang, Minghsin University of Science and Technology (Taiwan); Chao-Te Lee, National Applied Research Laboratories (Taiwan); Tan Dat Le, Cheng-Chung Jaing, Bing-Mau Chen, Yih-Shing Lee, Minghsin University of Science and Technology (Taiwan)

The optical and surface properties of the polydimethylsiloxane layers were investigated using a normal incidence spectrophotometer, variable incidence angle spectroscopic ellipsometry, and a contact angle measurement system after the surfaces of the polydimethylsiloxane layers were treated with low pressure oxygen plasma.

  Preview abstract
 

Manuscript ID.  0139
Paper No.  2023-SUN-P0803-P014
Wei-Chin Yeh Conductivity Study of Annealed Sn-doped Ga2O3 by Spray Pyrolysis
Wei-Chin Yeh, Hsin-Hui Kuo, Jui-Yang Feng, Wen-How Lan, National University of Kaohsiung (Taiwan)

The Ga2O3 films with different Sn doping (Ga2O3:Sn) were prepared by spray pyrolysis at 450oC on p-Si substrate. The film deposition rate and electric conductivity for the Ga2O3:Sn films was studied. With post 800oC anneal process, enhanced film conductivity and small film thickness reduction were characterized. Film with enhanced conductivity 0.029 Scm-1 was characterized after 800oC anneal process for the film with 3% Sn doping in precursor. The post anneal process shows an effective method for conductivity enhancement for the Ga2O3:Sn film deposited by spray pyrolysis.

  Preview abstract
 

Manuscript ID.  0290
Paper No.  2023-SUN-P0803-P015
DONG-MOU WUN Photocatalytic Performance of CuO(Copper Oxide) Thin Films by Pulsed Laser Deposition
CHENG-HAN GUO, DONG-MOU WUN, National Taipei University of Technology (Taiwan)

In this paper, the pulsed laser deposition method was used to grow the copper oxide film on the C-plane sapphire substrate. The experiment used the laser light source Nd:YAG laser, and the wavelength of the quadrupled frequency is 266nm, the pulse width was <10ns, and the pulse frequency is 10HZ. X-ray diffraction (XRD) is used to understand the quality of film growth;ultraviolet-visible spectrometer (UV-VIS) is used to measure the transmission spectrum of the film, and then the film is placed in methylene blue solution for photocatalytic experiments to understand the effect of its photocatalyst.

  Preview abstract
 

Manuscript ID.  0897
Paper No.  2023-SUN-P0803-P016
Yun-Jui Yeh Effect of deposition pressure on the optoelectronic characteristics of p-type Cu-doped CrO2 thin films
Yun-Jui Yeh, Yu-En Chen, Bhavya Kondapavuluri, Tsung-An Yang, Sindu Gnanam A B, Sriranjani SIVASUBRAMANIAN, Balaji Gururajan, Wei-Sheng Liu, Yuan Ze University (Taiwan)

This study produced Cu-doped CrO2 thin films through reactive magnetron sputtering at deposition pressures from 3 to 7 mTorr. Following deposition, rapid thermal annealing (RTA) occurred at 600 °C for 5 minutes. The investigation encompassed structural, optical, and electrical analyses. X-ray diffraction (XRD) revealed distinctive CuCrO2 phase peaks at (006) and (012) orientations. Notably, the 3 mTorr-deposited film showcased exceptional attributes, including 76% transmittance in the visible range and 12.46 Ω-cm resistivity. These findings hold significance for advancing transparent UV photodetectors.

  Preview abstract
 

Manuscript ID.  0898
Paper No.  2023-SUN-P0803-P017
Yu-En Chen Investigating the Influence of Oxygen Flow Rate on the Optoelectronic Characteristics of P-Type Cu-Doped CrO2 Thin Films
Yu-En Chen, Yun-Jui Yeh, Tsung-An Yang, Bhavya Kondapavuluri, Sindu Gnanan A. B., Sriranjani SIVASUBRAMANIAN, Balaji Gururajan, Wei-Sheng Liu, Yuan Ze University (Taiwan)

We deposited Cu-Doped CrO2 (CuCrO2) delafossite thin films on quartz substrates using reactive RF magnetron sputtering. Films were made from a copper-chromium metal alloy target with a 1:1 mass ratio, employing oxygen and argon as sputtering gases. X-ray diffraction (XRD) confirmed well-defined CuCrO2 crystal structures. Transmittance measurements revealed 65% transmittance in the 550 ~ 800 nm visible wavelength range. The films exhibited a minimum resistivity of 3.0 Ω-cm and a high carrier concentration of 3.0×1019 cm-3.

  Preview abstract
 

Manuscript ID.  0973
Paper No.  2023-SUN-P0803-P018
Meng-Fu Chi Corrosion resistance of yttrium oxide (Y2O3) thin film and yttrium aluminum garnet (YAG) thin film
Meng-Fu Chi, Duy Thanh Cu, National Central University (Taiwan); Tsung-Feng Wu, Chun-Chih Liao, Guo-Yang Ciou, Chia-Te Lin, Feedback Technology (Taiwan); Chen-Cheng Kuo, National Central University (Taiwan)

In this study, Yttrium oxide (Y2O3) and yttrium aluminum garnet (YAG) were coated on B270 substrates using an ion-assisted electron gun (E-gun) evaporation system. Different coating parameters were investigated, including the use of ion sources. A microwave plasma etching machine was then used to etch the thin film coatings under different parameters, while fixing the microwave power and gas ratio. The white light interferometry was used to measure the etching thickness. The results showed that the corrosion resistance of YAG is better than Y2O3.

  Preview abstract
 

Manuscript ID.  1018
Paper No.  2023-SUN-P0803-P019
CHENG XUAN Yang Design and fabrication of anti-reflection coatings for different plastic lenses with a low residual stress
CHENG XUAN Yang, Chun-Lin Tien, Ming-Jie Huang, Yi-Min Huang, Feng Chia University (Taiwan)

This work presents a four-layer anti-reflection coating (ARC) design using SiO2 and Ta2O5 materials with Essential Macleod software. The four-layer anti-reflection coatings were prepared by ion-beam assisted deposition and electron beam evaporation system. The proposed four-layer anti-reflection coating achieved a transmittance of 99% in the visible light range and exhibited a compressive residual stress of 33 MPa.

  Preview abstract
 

Manuscript ID.  0515
Paper No.  2023-SUN-P0803-P020
En-Min Huang Investigation of Silicon Zinc Tin Oxide Thin-Film Transistors Fabricated by RF Sputtering
Hao-Wen Shih, Chia-Ying Li, En-Min Huang, National Cheng Kung University (Taiwan); Sheng-Po Chang, National Kaohsiung University of Science and Technology (Taiwan); Shoou-Jinn Chang, Jone-Fang Chen, National Cheng Kung University (Taiwan)

In this research, we prepared SZTO thin-film transistors using magnetron sputtering. By controlling the sputtering power of silicon oxide, we adjusted the number of free carriers and defects to modify the electrical characteristics of the thin-film transistors. The results showed that the sputtering power of silicon oxide had a significant influence on the drain current leakage, decreasing from 7.88×10^(-9) to 3.71×10^(-11), due to the suppression of the oxygen vacancies.

  Preview abstract
 

Manuscript ID.  0909
Paper No.  2023-SUN-P0803-P021
Cheng-Chung Jaing Design and Implementation of Black Coating Using ITO-Free Electrochromic Film
Jen-Hao Wen, Minghsin University of Science and Technology (Taiwan); Chao-Te Lee, National Applied Research Laboratories (Taiwan); Yu-Wei Chen, Thi Cam Tien Truong, Cheng-Chung Jaing, Bing-Mau Chen, Yih-Shing Lee, Pang-Shiu Chen, Minghsin University of Science and Technology (Taiwan)

An ITO-free electrochromic bleached black coating was fabricated from a single W target at room temperature by a pulsed dc magnetron sputtering system. The black coating consisted of three pairs of double-layer films, and each pair included an electrochromic WO3 layer and an electrode W layer.

  Preview abstract
 

Manuscript ID.  0742
Paper No.  2023-SUN-P0803-P022
CHENG ZI ZHENG Properties of Ga-N co-doped p-type ZnO transparent conducting thin films prepared by pulsed laser deposition
HAO CHENG HUNG, Chen Tai, K W Hung, CHENG ZI ZHENG, National Taipei University of Technology (Taiwan)

ZnO is an inorganic compound with good optical properties. It has high transmittance in the visible wavelength range and can be used for transparent conductive films. ZnO has a wide bandgap, making it suitable for various applications like thin film transistors and solar cells. Doping Ga content improved its conductivity. Achieving p-type ZnO is challenging due to its chemical structure, but Ga-N co-doping successfully produced a p-type transparent conductive film with high transmittance and excellent electrical properties: low resistivity, high mobility, and high carrier concentration.

  Preview abstract
 

Manuscript ID.  1055
Paper No.  2023-SUN-P0803-P023
LIANG ZHANG Optical Design of Energy Conversion Layer for high Photoelectric Conversion Efficiency of an Organic Solar Cell
LIANG ZHANG, Woo Yong Kim, Chul Gyu Jhun, Hoseo University (Korea)

Organic solar cells (OSCs) are devices that converts solar energy into electricity,
and photoelectric conversion efficiency (PCE) is one of the important parameters to evaluate
the performance of OSCs. We propose a new idea for the optical structure design of OSCs in
order to improve its PCE


  Preview abstract
 

Manuscript ID.  0234
Paper No.  2023-SUN-P0803-P024
Shao-Fu Wu Effect of Ag Doping on the Degradation Efficiency of Titanium Dioxide thin films for Methylene Blue
Yao-Te Wang, Shao-Fu Wu, National Taipei University of Technology (Taiwan)

In this experiment, we employed a cost-effective and easily-prepared method, known as the ultrasonic spray pyrolysis, to synthesize the TiO2 photocatalysis. The goal of this study was to investigate the influence of silver-doped titanium dioxide thin films on the degradation of methylene blue. The experimental results revealed that the degradation rate of methylene blue increased dramatically from 22% to 57% as Ag was doped

  Preview abstract
 

Manuscript ID.  0518
Paper No.  2023-SUN-P0803-P025
Bo-Zhi Wang Investigation of MgSiO3 based Resistive Random-Access Memory
Fu-Yuan Jheng, Chih-Cheng Cheng, National Cheng Kung University (Taiwan); Sheng-Po Chang, National Kaohsiung University of Science and Technology (Taiwan); Bo-Zhi Wang, Shoou-Jinn Chang, Jone-Fang Chen, Wei-Chih Lai, National Cheng Kung University (Taiwan)

With the rapid development of semiconductors, it’s a new trend to make research on new materials and new structure memories as it becomes more difficult to shrink the device size. In the study, we fabricate a new generation memory, or Resistive Random Access Memory (RRAM), with MgSiO3 switching layer. This study investigates the impact of different film densities on MgSiO3 based RRAM devices. The results demonstrate that films with higher densities exhibit larger Forming voltage as well as a higher HRS/LRS ratio. These findings suggest a significant correlation between the mechanism of conductive filament formation and film density.

  Preview abstract